中国国产浸没式DUV光刻机进入生产

Holy China did it: a homegrown alternative to ASML’s immersion DUV lithography machines is now entering production.

Lithography was considered one of the hardest parts of the semiconductor supply chain for China to reproduce. ASML dominates advanced DUV equipment and remains the world’s only supplier of EUV systems.

Western export controls were built around this bottleneck: without continued access to ASML’s machines and servicing, Chinese chipmakers were expected to fall further behind.

Now, a state-backed Shanghai company reportedly plans to build five domestic DUV systems this year and around 20 in 2027. The first machines will go to SMIC, Hua Hong and CXMT.

lithography was one of the hardest gaps in China’s semiconductor supply chain. And they figured out a solution. This is insane.